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Services

Our core expertise in Wet, Implant and CMP modules.​

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We provide a suite of services ranging from equipment refurbishment, tool installation, spares overhaul, consumables supply and CIP retrofits for the following tool types.

WET

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  • DNS FC-3000 Series / SU-3000 Series / SS-3000 Series ;

  • TEL Expedius / Expedius+ ; 

  • LAM SEZ 300 Series / SEZ DV30 Series / SEZ DVP

IMPLANT

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  • Varian 900XP / 3000XP / HCP / Trident ;

  • Quantum 80 / LEAP

CMP

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  • Mirra Mesa / Ontrak / DNS

  • Reflexion / Reflexion LK

Right engineering solution with the right value

NanoStack

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