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ENGINEERING
Services
Our core expertise in Wet, Implant and CMP modules.​
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We provide a suite of services ranging from equipment refurbishment, tool installation, spares overhaul, consumables supply and CIP retrofits for the following tool types.
WET
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DNS FC-3000 Series / SU-3000 Series / SS-3000 Series ;
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TEL Expedius / Expedius+ ;
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LAM SEZ 300 Series / SEZ DV30 Series / SEZ DVP
IMPLANT
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Varian 900XP / 3000XP / HCP / Trident ;
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Quantum 80 / LEAP
CMP
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Mirra Mesa / Ontrak / DNS
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Reflexion / Reflexion LK
Right engineering solution with the right value
NanoStack
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